THERMAL EVOLUTION OF GELS DERIVED FROM CH3SI(OC2H5)3 BY THE SOL-GEL METHOD

被引：108

作者：

KAMIYA, K ^{[1
]}

YOKO, T ^{[1
]}

TANAKA, K ^{[1
]}

TAKEUCHI, M ^{[1
]}

机构：

[1] KYOTO UNIV,INST CHEM RES,UJI,KYOTO 611,JAPAN

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1990年 / 121卷 / 1-3期

关键词：

D O I：

10.1016/0022-3093(90)90128-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The structure change of CH3Si(OC2H5)3 (MTES)-derived gels on heating in N2 and NH3 to form C- and N-containing SiO2 glasses, respectively, was examined by IR spectroscopy and thermal analysis. The gel was considered to consist of siloxane polymers containing strained 4-fold siloxane ring structure. The SiCH3 and 4-fold rings were thermally cleaved around 700°C to form SiH, SiOH and carbonous matter in N2, and SiNH2 as well as SiH and SiOH bonds in NH3. The SiNH2 was condensed at higher temperatures, resulting in N-containing SiO2 glass. © 1990.

引用

页码：182 / 187

页数：6

共 7 条

[1] OXYNITRIDE GLASS-FORMATION FROM GELS [J].