EFFECTS OF SURFACE TREATMENTS AND DEPOSITION CONDITIONS ON THE ADHESION OF SILICON DIOXIDE THIN-FILM ON POLYMETHYLMETHACRYLATE

被引：22

作者：

LIAN, YM

LEU, KW

LIAO, SL

TSAI, WH

机构：

[1] Polymer Analysis and Characterization Department, Union Chemical Laboratories, ITRI, Hsinchu

来源：

SURFACE & COATINGS TECHNOLOGY | 1995年 / 71卷 / 02期

关键词：

POLYMETHYLMETHACRYLATE; SILICON DIOXIDE; ADHESION; GLOW DISCHARGE; THIN FILM;

D O I：

10.1016/0257-8972(94)01013-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Factors influencing the adhesion of silicon dioxide thin film on polymethylmethacrylate (PMMA) were studied. The effects of cleaning, plasma treatment, antistatic treatment, outgas treatment and chromium coating on the adhesion were studied using a five factor and two level L(16) experimental design. The chromium coating had a maximum effect on the adhesion, as confirmed from the L(16) experimental data. The effects of glow discharge treatment, vacuum pressure and deposition rate on the adhesion were also studied using a three factor and two level L(4) experimental design. The glow discharge treatment had a major effect on the adhesion of silicon dioxide thin film, with the vacuum pressure and deposition rate having a minor effect on the adhesion. The surface chemistry and topography of PMMA were changed after glow discharge treatment, as revealed by surface characterization using X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and atomic force microscopy.

引用

页码：142 / 150

页数：9