Optimization for Permeability and Electrical Resistance of Porous Alumina-Based Ceramics

被引：14

作者：

Kim, Jae ^{[1
,2
]}

Ha, Jang-Hoon ^{[1
]}

Lee, Jongman ^{[1
]}

Song, In-Hyuck ^{[1
,2
]}

机构：

[1] Korea Inst Mat Sci, Powder & Ceram Div, Chang Won 51508, South Korea

[2] Korea Univ Sci & Technol UST, Daejeon 34113, South Korea

来源：

JOURNAL OF THE KOREAN CERAMIC SOCIETY | 2016年 / 53卷 / 05期

关键词：

Alumina; Porous material; Air permeability; Electrical resistance;

D O I：

10.4191/kcers.2016.53.5.548

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Recently, porous alumina-based ceramics have been extensively applied in the semi-conductor and display industries, because of their high mechanical strength, high chemical resistance, and high thermal resistance. However, the high electrical resistance of alumina-based ceramics has a negative effect in many applications due to the generation of static electricity. The low electrical resistance and high air permeability are key aspects in using porous alumina-based ceramics as vacuum chucks in the semi-conductor industry. In this study, we tailored the pore structure of porous alumina-based ceramics by adjusting the mixing ratio of the starting alumina, which has different particle sizes. And the electrical resistance was controlled by using chemical additives. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimetry, capillary flow porosimetry, a universal testing machine, X-ray diffraction, and a high-resistance meter.

引用

页码：548 / 556

页数：9

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