LASER-INDUCED THERMAL ETCHING OF METAL AND SEMI-CONDUCTOR SURFACES

被引：7
作者：
MURPHY, RJ
RITTER, GJ
机构：
来源：
NATURE | 1966年 / 210卷 / 5032期
关键词：
D O I：
10.1038/210191a0
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
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页码：191 / &
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