A NEW EXPERIMENTAL PROCEDURE FOR THE BACKSCATTERING CORRECTION IN AUGER ANALYSIS

被引：14
作者：
BENHAYOUNE, H
JBARA, O
THOMAS, X
MOUZE, D
CAZAUX, J
机构：
[1] LASSI, GRSM, Faculté des sciences, Reims, 51062
来源：
SURFACE AND INTERFACE ANALYSIS | 1993年 / 20卷 / 07期
关键词：
D O I：
10.1002/sia.740200710
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
From the experimental determination of the electron backscattering factor eta (using a positively polarized specimen holder) and applying an analytical expression correlating eta and the Auger backscattering factor r, we demonstrate experimentally the possibility of correcting Auger spectra and profiles from the backscattering effects.
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收藏
页码：600 / 602
页数：3
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