DEFECT PHOTO-LUMINESCENCE FROM PULSED-LASER-ANNEALED ION-IMPLANTED SI

被引：28

|

作者：

SKOLNICK, MS

CULLIS, AG

WEBBER, HC

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 06期

关键词：

D O I：

10.1063/1.92405

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：464 / 466

页数：3

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