Plasma treatment of Cd1-xZnxTe (x similar to 0.04) single crystals

被引：0
作者：
Smirnov, A. B. [1 ]
机构：
[1] Natl Acad Sci Ukraine, V Lashkarev Inst Semicond Phys, UA-03028 Kiev, Ukraine
来源：
FUNCTIONAL MATERIALS | 2011年 / 18卷 / 02期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The antireflection effect of a diamond-like carbon (DLC) film in the a-C:H:N/CdZnTe optical system in the 2-16 mu m range was determined from the optical transmission spectra. An investigation of the plasma treatment effect on the surface of Cd1-xZnxTe (x similar to 0.04) substrate prior to DLC films fabrication was carried out. The irradiation of semiconductor substrate with argon plasma was found to be optimal for improving its optical transmittance. Analysis of the absorption spectra of DLC films obtained by FTIR-spectrometry technique into the interval 1000-3000 cm(-1) has been done. Peaks corresponded to deformation and stretching vibrations of C-H bonds as well as C-C and C=O bonds were observed.
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页码：176 / 180
页数：5
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