SELECTIVE RESPUTTERING INDUCED ANISOTROPY IN AMORPHOUS FILMS

被引：64
作者：
GAMBINO, RJ
CUOMO, JJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词：
D O I：
10.1116/1.569574
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：296 / 301
页数：6
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