ETCHING OF ALPHA-SILICON CARBIDE

被引：30
作者：
BRANDER, RW
BOUGHEY, AL
机构：
来源：
BRITISH JOURNAL OF APPLIED PHYSICS | 1967年 / 18卷 / 07期
关键词：
D O I：
10.1088/0508-3443/18/7/304
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：905 / &
相关论文
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