Refractive Index Sensor Based on Gradient Waveguide Thickness Guided-Mode Resonance Filter

被引:9
作者
Hsiung, Chan-Te [1 ]
Huang, Cheng-Sheng [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 30010, Taiwan
关键词
Grating; guided-mode resonance (GMR); refractive index (RI) sensor; subwavelength structure;
D O I
10.1109/LSENS.2018.2883471
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, a novel refractive index sensor based on gradient waveguide thickness guided-mode resonance (GWT-GMR) is proposed. The GWT can convert an spectral information into an spatial information, which can be measured using a charged coupled device (CCD) instead of a bulky spectrometer. A GWT-GMR sensor of size only 1261 x 200 mu m(2) has a detection range of 0.109 refractive index units (RIU), sensitivity of 16 239 mu m/RIU, and the limit of detection of 6.9 x 10(-4) RIU, which are sufficient for many practical applications. Multiplexing can be easily implemented because of sensor compactness and the simple readout of the CCD. Moreover, the system is suitable for handheld devices or integration with smartphones for potential biosensing applications.
引用
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页数:4
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