CORRELATION OF VERY THIN SILICON DIOXIDE QUALITY WITH HAZE ON POLISHED SILICON-WAFERS

被引：0

作者：

TU, H ^{[1
]}

ZHANG, C ^{[1
]}

XONG, D ^{[1
]}

WAN, Q ^{[1
]}

XU, X ^{[1
]}

机构：

[1] GEN RES INST NONFERROUS MET,BEIJING,PEOPLES R CHINA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C125 / C125

页数：1

共 50 条

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