ELECTRONIC ULTRA-HIGH VACUUM PUMP

被引:68
作者
HALL, LD
机构
关键词
D O I
10.1063/1.1716198
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:367 / 370
页数:4
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