COMPUTATION OF MAGNETIC DEFLECTORS FOR ELECTRON-BEAM LITHOGRAPHY

被引：10
|
作者：
LENCOVA, B [1 ]
LENC, M [1 ]
VANDERMAST, KD [1 ]
机构：
[1] DELFT UNIV TECHNOL,DEPT APPL PHYS,2628 CJ DELFT,NETHERLANDS
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.584678
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1846 / 1850
页数：5
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