DETERMINATION OF IMPURITIES IN SILICON BY LOW-TEMPERATURE FOURIER-TRANSFORM INFRARED SPECTROSCOPY

被引：0
|
作者：
BABER, SC [1 ]
机构：
[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75222
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1978年 / 175卷 / MAR期
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：79 / 79
页数：1
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