DETERMINATION OF IMPURITIES IN SILICON BY LOW-TEMPERATURE FOURIER-TRANSFORM INFRARED SPECTROSCOPY

被引：0

作者：

BABER, SC ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75222

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1978年 / 175卷 / MAR期

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：79 / 79

页数：1

共 50 条

[1] NET AND TOTAL SHALLOW IMPURITY ANALYSIS OF SILICON BY LOW-TEMPERATURE FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
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