INTEGRATED BEAM STRAIN-GAUGES

被引:0
|
作者
ZIMIN, VN
SALAKHOV, NZ
SHELEPIN, NA
机构
来源
MEASUREMENT TECHNIQUES USSR | 1994年 / 37卷 / 03期
关键词
D O I
10.1007/BF02614268
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We consider the results of development of silicon strain-gauge transducers. We present the technical characteristics for different types of integrated silicon strain-gauge transducers.
引用
收藏
页码:300 / 302
页数:3
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