COMPARISON OF THE CHEMICAL-STRUCTURE AND COMPOSITION BETWEEN N2O OXIDES AND REOXIDIZED NH3-NITRIDED OXIDES

被引：40

作者：

BHAT, M ^{[1
]}

AHN, J ^{[1
]}

KWONG, DL ^{[1
]}

ARENDT, M ^{[1
]}

WHITE, JM ^{[1
]}

机构：

[1] UNIV TEXAS,DEPT CHEM,AUSTIN,TX 78712

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 09期

关键词：

D O I：

10.1063/1.111951

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The chemical structure and composition of ultrathin N2O oxides have been investigated using angle resolved x-ray photoelectron spectroscopy and compared to those of reoxidized NH3-nitrided SiO2. It is found that N2O oxide shows a second nitrogen-related bond (N-O bonds) in close proximity to the SiO2/Si interface in addition to the typically observed Si-N bonds in reoxidized NH3-nitrided SiO2. In addition, the change of the difference between Si 2p and O 1s binding energies in the N2O oxide and reoxidized NH3-nitrided SiO2 with the take-off angle is negligible due to the interfacial nitrogen incorporation.

引用

页码：1168 / 1170

页数：3

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