DETERMINATION OF YOUNG MODULUS OF THIN-FILMS

被引：10
|
作者：
MADDALENA, A
机构：
[1] Dipartimento di Ingegneria Meccanica Sezione Materiali, Università di Padova, Padova
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1992年 / 75卷 / 10期
关键词：
D O I：
10.1111/j.1151-2916.1992.tb05533.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
An improved vibrating-reed method is described for determining Young's modulus of thin films deposited on both sides of a substrate. This technique consists of measuring the resonant frequency of a cantilever composite beam obtained by coating both sides of a substrate. The calculation procedure is presented to evaluate the film modulus from sample geometry, material density, and mechanical resonant frequency. For accurate determination of resonant frequency, the phase angle between the exciting and vibration signals is analyzed. Using the proposed technique, Young's modulus of ZrO2 thin films is calculated, obtaining a value in agreement with literature data.
引用
收藏
页码：2915 / 2917
页数：3
相关论文
共 50 条
  • [11] Determination of Young's modulus of thin films using the concept of the effective indenter
    Herrmann, M.
    Richter, F.
    PHILOSOPHICAL MAGAZINE, 2011, 91 (7-9) : 1356 - 1369
  • [12] Determination of Young's modulus of thin films used in embedded passive devices
    Djakaria, R
    Chandran, BI
    Gordon, MH
    Schmidt, WF
    Lenihan, TG
    47TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 1997 PROCEEDINGS, 1997, : 745 - 749
  • [13] Determination of reduced Young s modulus of thin films using indentation test
    Wuzhu YAN
    Acta Metallurgica Sinica(English Letters), 2009, 22 (06) : 468 - 480
  • [14] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS
    PETERSEN, KE
    GUARNIERI, CR
    JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766
  • [15] A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS
    BROMLEY, EI
    RANDALL, JN
    FLANDERS, DC
    MOUNTAIN, RW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1364 - 1366
  • [16] DETERMINATION OF COBALT AND CHROMIUM IN THIN-FILMS
    VILENCHIK, ZM
    ZAKHAROV, EK
    KUZNETSOV, VV
    KOSHEVAYA, TM
    INDUSTRIAL LABORATORY, 1990, 56 (01): : 8 - 9
  • [17] A practical method for the determination of the Young's modulus and residual stresses of PVD thin films
    Tran, MD
    Poublan, J
    Dautzenberg, JH
    THIN SOLID FILMS, 1997, 308 : 310 - 314
  • [18] Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films
    Nazeer, H.
    Nguyen, M. D.
    Woldering, L. A.
    Abelmann, L.
    Rijnders, G.
    Elwenspoek, M. C.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (07)
  • [19] Influence of silicon orientation and cantilever undercut on the determination of the Young's modulus of thin films
    Nazeer, H.
    Woldering, L. A.
    Abelmann, L.
    Nguyen, M. D.
    Rijnders, G.
    Elwenspoek, M. C.
    MICROELECTRONIC ENGINEERING, 2011, 88 (08) : 2345 - 2348
  • [20] MECHANICAL-PROPERTIES OF THIN-FILMS - MEASUREMENTS OF ULTRAMICROINDENTATION HARDNESS, YOUNG MODULUS AND INTERNAL-STRESS
    TSUKAMOTO, Y
    YAMAGUCHI, H
    YANAGISAWA, M
    THIN SOLID FILMS, 1987, 154 (1-2) : 171 - 181
12345