A NUMERICAL-MODEL OF THE FLOW AND HEAT-TRANSFER IN A ROTATING-DISK CHEMICAL VAPOR-DEPOSITION REACTOR

被引:101
作者
EVANS, G [1 ]
GREIF, R [1 ]
机构
[1] UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, CA 94720 USA
来源
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME | 1987年 / 109卷 / 04期
关键词
D O I
10.1115/1.3248205
中图分类号
O414.1 [热力学];
学科分类号
摘要
引用
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页码:928 / 935
页数:8
相关论文
共 15 条
[1]   A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J].
COLTRIN, ME ;
KEE, RJ ;
MILLER, JA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :425-434
[3]  
GOSMAN AD, 1973, LECTURE NOTES IMPERI
[4]   HETEROGENEOUS KINETICS AND MASS-TRANSFER IN CHEMICAL VAPOR-DEPOSITION PROCESSES .3. THE ROTATING-DISK REACTOR [J].
HITCHMAN, ML ;
CURTIS, BJ .
JOURNAL OF CRYSTAL GROWTH, 1982, 60 (01) :43-56
[5]   CVD IN STAGNATION POINT FLOW - AN EVALUATION OF THE CLASSICAL 1D-TREATMENT [J].
HOUTMAN, C ;
GRAVES, DB ;
JENSEN, KF .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (05) :961-970
[6]  
KAPUR D, 1985, NOV AICHE ANN M CHIC
[7]   HEAT TRANSFER BY LAMINAR FLOW FROM A ROTATING PLATE [J].
MILLSAPS, K ;
POHLHAUSEN, K .
JOURNAL OF THE AERONAUTICAL SCIENCES, 1952, 19 (02) :120-126
[8]  
Paolucci S., 1982, 828257 SAND SAND NAT
[9]  
Patankar S., 1980, NUMERICAL HEAT TRANS
[10]   SILICON DEPOSITION ON A ROTATING-DISK [J].
POLLARD, R ;
NEWMAN, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) :744-752