OPTICAL-ABSORPTION AS A CONTROL TEST FOR PLASMA SILICON-NITRIDE DEPOSITION

被引：48

作者：

RAND, MJ

WONSIDLER, DR

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 01期

关键词：

D O I：

10.1149/1.2131407

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：99 / 101

页数：3

共 12 条

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[3]

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[4]

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PHILIPP, HR .

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[7] OPTICAL PROPERTIES OF SILICON-NITRIDE [J].

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (02) :295-300

[8]

RAND MJ, UNPUBLISHED

[9]

Reinberg A. R., 1973, US patent, Patent No. [3,757,733, 3757733]

[10]

REINBERG AR, 1974, MAY EL SOC M SAN FRA

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