SYNTHESIS AND ANALYSIS OF BURIED SIC LAYERS IN MONOCRYSTALLINE SILICON

被引：8

作者：

DURUPT, P

CANUT, B

ROGER, JA

PIVOT, J

GAUTHIER, JP

机构：

[1] UNIV LYON 1,CNRS,DEPT PHYS MAT,F-69622 VILLEURBANNE,FRANCE

[2] UNIV LYON 1,CNRS,CRISTALLOG LAB,F-69622 VILLEURBANNE,FRANCE

来源：

THIN SOLID FILMS | 1982年 / 90卷 / 03期

关键词：

D O I：

10.1016/0040-6090(82)90394-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：353 / 357

页数：5

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[8] OPTICAL-ABSORPTION AND ELECTRICAL-CONDUCTIVITY OF SIC FILMS PRODUCED BY ION-IMPLANTATION [J].

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