SYNTHESIS OF TIN/TICN/TIC LAYER SYSTEMS ON STEEL AND CERMET SUBSTRATES BY PACVD

被引：46

作者：

RIE, KT

GEBAUER, A

WOHLE, J

TONSHOFF, HK

BLAWIT, C

机构：

[1] TECH UNIV CAROLO WILHELMINA BRAUNSCHWEIG,INST OBERFLACHENTECH & PLASMATECH WERKSTOFFENTWIC,D-38108 BRAUNSCHWEIG,GERMANY

[2] UNIV HANNOVER,INST FERTIGUNGSTECH & SPANENDE WERKZEUGMASCHINEN,D-30159 HANNOVER,GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1995年 / 74-5卷 / 1-3期

关键词：

PACVD; PLASMA DIAGNOSTICS; CERMETS; HARD COATINGS; WEAR RESISTANCE;

D O I：

10.1016/0257-8972(95)08243-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The coating of cermet cutting tools with various layer systems was performed by the plasma-assisted chemical vapour deposition (PACVD) process. Multilayers consisting of TiN, Ti(C,N) and TiC layers were deposited with various layer thicknesses and sequences. The structure, chemical composition and hardness distribution of the layer systems were investigated. The hardness of the system is dependent on the top layer. Milling tests were performed to investigate the wear behaviour of coated cermet tools. The capabilities of cermets can be influenced over a wide range by PACVD coatings. By coating cermets with multilayers, the lifetime in milling experiments could be increased by almost a factor 2.

引用

页码：375 / 381

页数：7

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