AN ALGAAS LASER WITH HIGH-QUALITY DRY ETCHED MIRRORS FABRICATED USING AN ULTRAHIGH-VACUUM INSITU DRY ETCHING AND DEPOSITION PROCESSING SYSTEM

被引：21

作者：

UCHIDA, M

ISHIKAWA, S

TAKADO, N

ASAKAWA, K

机构：

[1] NEC, Kawasaki, Jpn

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1988年 / 24卷 / 11期

关键词：

Manuscript received January 29; 1988; revised May 5; 1988. This work was supported in part by the Agency of Industrial Science and Technology; Ministry of International Trade and Industry. The authors are with the Opto-Electronics Research Laboratories; NEC Corporation; 4-1-1; Miyazaki; Miyamae-ku; Kawasaki; 213; Japan. IEEE Log Number 8823282;

D O I：

10.1109/3.8560

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

17

引用

收藏

页码：2170 / 2177

页数：8

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