PRESSURE MEASUREMENT BY LASER IONIZATION - DIRECT COUNTING OF GENERATED IONS BY IMAGING OF THEIR SPATIAL-DISTRIBUTION

被引:9
作者
ICHIMURA, S
SEKINE, S
KOKUBUN, K
SHIMIZU, H
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 04期
关键词
D O I
10.1116/1.579046
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The spatial distribution of ions generated by nonresonant multiphoton ionization of Xe and H-2 with second harmonics of a picosecond YAG laser was imaged with a new detection system. Ions were observed as bright spots on a microchannel plate (MCP) intensifier, and they appeared on a straight line, reflecting the ion generation along a laser beam path. The size of the ionization region, which has a spindle shape, was estimated from the image. The maximum diameter of the ionization region was approximately 60 mum, and the length was 3.6 mm for a Xe gas pressure of 5 X 10(-5) Pa and an incident laser energy of 10 mJ/pulse for our measurement system. The size depended on the incident laser energy, and on the lens assembly used for the focusing of the laser beam. The possibility of relative pressure measurement by counting of the bright spot on the MCP intensifier was also investigated.
引用
收藏
页码:1734 / 1739
页数:6
相关论文
共 11 条
[1]   COUNTING THE ATOMS [J].
HURST, GS ;
PAYNE, MG ;
KRAMER, SD ;
CHEN, CH .
PHYSICS TODAY, 1980, 33 (09) :24-29
[2]   DEMONSTRATION OF ONE-ATOM DETECTION [J].
HURST, GS ;
NAYFEH, MH ;
YOUNG, JP .
APPLIED PHYSICS LETTERS, 1977, 30 (05) :229-231
[3]   RESONANCE IONIZATION SPECTROSCOPY AND ONE-ATOM DETECTION [J].
HURST, GS ;
PAYNE, MG ;
KRAMER, SD ;
YOUNG, JP .
REVIEWS OF MODERN PHYSICS, 1979, 51 (04) :767-819
[4]   PRELIMINARY-RESULTS OF VACUUM PRESSURE MEASUREMENT BY LASER IONIZATION METHOD [J].
ICHIMURA, S ;
KOKUBUN, K ;
SHIMIZU, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L573-L575
[5]   NEW COUNTING SYSTEM FOR DETECTION OF CHARGED-PARTICLES - APPLICATION TO IONS GENERATED BY A PULSED LASER-BEAM [J].
ICHIMURA, S ;
GOTO, K ;
KOKUBUN, K ;
SHIMIZU, H ;
HASHIZUME, H .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (04) :1192-1195
[6]   A NEW ION COUNTING SYSTEM DEVISED FOR MASS-SELECTIVE DETECTION OF SPUTTERED NEUTRALS IN LASER SNMS [J].
ICHIMURA, S ;
GOTO, K ;
KOKUBUN, K ;
SHIMIZU, H ;
MATSUURA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (07) :L1209-L1212
[7]   NONRESONANT MULTIPHOTON IONIZATION OF RARE-GASES [J].
KOKUBUN, K ;
ICHIMURA, S ;
HASHIZUME, H ;
SHIMIZU, H ;
OOWADANO, Y ;
MATSUMOTO, Y ;
ENDO, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3310-3313
[8]   PRESSURE MEASUREMENT METHOD USING LASER IONIZATION FOR XHV [J].
KOKUBUN, K ;
ICHIMURA, S ;
SHIMIZU, H ;
SEKINE, S .
VACUUM, 1993, 44 (5-7) :657-659
[9]   MEASUREMENT OF EXTREME-HIGH-VACUUM PRESSURE BY LASER IONIZATION [J].
KOKUBUN, K ;
ICHIMURA, S ;
SEKINE, S ;
SHIMIZU, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (8A) :L1109-L1111
[10]  
MORELLEC J, 1982, ADV ATOM MOL PHYS, V18, P97, DOI 10.1016/S0065-2199(08)60240-7