INTERFACIAL AND SURFACE ENERGETICS OF COSI2

被引：41

作者：

ADAMS, DP ^{[1
]}

YALISOVE, SM ^{[1
]}

EAGLESHAM, DJ ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 09期

关键词：

D O I：

10.1063/1.357237

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The energetics of the CoSi2-Si interface and the CoSi2 surface have been investigated by analyzing the equilibrium shapes of isolated silicide precipitates. CoSi2 precipitates grown by heating 2 Angstrom of Co on a clean, reconstructed Si{100} surface formed with a number of orientations that remained stable upon annealing to high temperatures. Precipitates buried by a Si capping layer were shown to form along {111} and {100} interfaces. A ratio of the CoSi2-Si interfacial free energies has been measured from the shapes of a large number of buried precipitates indicating that gamma{100}/gamma{111}=1.43+/-0.07. It is suggested that the shape of CoSi2 equilibrated within vacuum consists of {111}, {100}, and {110} facets.

引用

页码：5190 / 5194

页数：5

共 27 条

[1] DETERMINATION OF THE COORDINATION-NUMBER OF CO ATOMS AT THE COSI2(A,B) SI(111) INTERFACE BY TRANSMISSION ELECTRON-MICROSCOPY [J].