ANALYSIS OF TIN DIOXIDE COATINGS BY MULTIPLE ANGLE OF INCIDENCE ELLIPSOMETRY

被引：22

作者：

HAITJEMA, H

WOERLEE, GF

机构：

来源：

THIN SOLID FILMS | 1989年 / 169卷 / 01期

关键词：

D O I：

10.1016/S0040-6090(89)80002-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 16

页数：16

共 17 条

[1]

ABRAMOWITZ M, 1970, HDB MATH FUNCTIONS, P310

[2]

Azzam R. M. A., 1977, ELLIPSOMETRY POLARIZ

[3]

Bevington P. R., 1969, DATA REDUCTION ERROR, P154

[4]

BRUGGEMAN DAG, 1935, ANN PHYS LPZ, V24, P635

[5] MULTIPLE-ANGLE ELLIPSOMETRY OF SI-SIO2 POLYCRYSTALLINE SI SYSTEM [J].

GAILLYOVA, Y ;

SCHMIDT, E ;

HUMLICEK, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1985, 2 (05) :723-726

[6] PREPARATION AND GROWTH OF SNO2 THIN-FILMS AND THEIR OPTICAL AND ELECTRICAL-PROPERTIES [J].

GROSSE, P ;

SCHMITTE, FJ ;

FRANK, G ;

KOSTLIN, H .

THIN SOLID FILMS, 1982, 90 (03) :309-315

[7] THE PHYSICAL-PROPERTIES OF FLUORINE-DOPED TIN DIOXIDE FILMS AND THE INFLUENCE OF AGING AND IMPURITY EFFECTS [J].

HAITJEMA, H ;

ELICH, J .

SOLAR ENERGY MATERIALS, 1987, 16 (1-3) :79-90

[8] SENSITIVITY EXTREMA IN MULTIPLE-ANGLE ELLIPSOMETRY [J].

HUMLICEK, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1985, 2 (05) :713-722

[9] PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY [J].

IBRAHIM, MM ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (12) :1622-&

[10] INFLUENCE OF SPRAY CONDITIONS AND DOPANTS ON HIGHLY CONDUCTING TIN DIOXIDE FILMS [J].

KARLSSON, T ;

ROOS, A ;

RIBBING, CG .

SOLAR ENERGY MATERIALS, 1985, 11 (5-6) :469-478

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