A MONTE-CARLO SIMULATION OF ELECTRON-BEAM LITHOGRAPHY USED TO CREATE 0.5-MU-M STRUCTURES ON GAAS

被引：4

|

作者：

CUMMINGS, KD

RESNICK, DJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584124

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：2033 / 2036

页数：4

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