ELECTRON-BEAM DAMAGE IN AUGER-ELECTRON SPECTROSCOPY

被引：250
作者：
PANTANO, CG [1 ]
MADEY, TE [1 ]
机构：
[1] NBS,DIV SURFACE SCI,WASHINGTON,DC 20234
来源：
APPLIED SURFACE SCIENCE | 1981年 / 7卷 / 1-2期
关键词：
D O I：
10.1016/0378-5963(81)90065-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：115 / 141
页数：27
相关论文
共 74 条
[1]   ELECTRON-BEAM EFFECTS IN DEPTH PROFILING MEASUREMENTS WITH AUGER-ELECTRON SPECTROSCOPY [J].
AHN, J ;
PERLEBERG, CR ;
WILCOX, DL ;
COBURN, JW ;
WINTERS, HF .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) :4581-4583
[2]   LOCAL COMPOSITIONAL CHANGES IN ALKALI SILICATE GLASSES DURING ELECTRON MICROPROBE ANALYSIS [J].
BOROM, MP ;
HANNEMAN, RE .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (05) :2406-&
[3]   APPLICATION OF ELECTRON-SPECTROSCOPY TO SURFACE STUDIES [J].
BRUNDLE, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :212-224
[4]   SURFACE-STRUCTURES OF PHTHALOCYANINE MONOLAYERS AND VAPOR-GROWN FILMS - LOW-ENERGY ELECTRON-DIFFRACTION STUDY [J].
BUCHHOLZ, JC ;
SOMORJAI, GA .
JOURNAL OF CHEMICAL PHYSICS, 1977, 66 (02) :573-580
[5]   EFFECTS OF ELECTRON-BOMBARDMENT DURING AUGER-ELECTRON ANALYSIS OF CORRODED METAL-SURFACES [J].
BURSTEIN, GT .
MATERIALS SCIENCE AND ENGINEERING, 1980, 42 (1-2) :207-214
[6]   STUDY OF CHARGING AND DISSOCIATION OF SIO2 SURFACES BY AES [J].
CARRIERE, B ;
LANG, B .
SURFACE SCIENCE, 1977, 64 (01) :209-223
[7]   SILICON-ON-SAPPHIRE EPITAXY BY VACUUM SUBLIMATION - LEED-AUGER STUDIES AND ELECTRONIC PROPERTIES OF FILMS [J].
CHANG, CC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (03) :500-&
[8]  
CHANG CC, 1974, CHARACTERIZATION SOL, P550
[9]  
CHAPPELL RA, 1974, PHYS CHEM GLASSES, V15, P130
[10]   AUGER ANALYSIS OF CHLORINE IN HCL-GROWN, OR CL2-GROWN SIO2 FILMS [J].
CHOU, NJ ;
OSBURN, CM ;
VANDERME.YJ ;
HAMMER, R .
APPLIED PHYSICS LETTERS, 1973, 22 (08) :380-381
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