OPTICAL REAL-TIME DEFECT-ENHANCEMENT DIAGNOSTIC SYSTEM

被引：6

作者：

GAETA, CJ

MITCHELL, PV

PEPPER, DM

机构：

[1] Hughes Research Laboratories, Malibu, CA

来源：

OPTICS LETTERS | 1992年 / 17卷 / 24期

关键词：

D O I：

10.1364/OL.17.001797

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have demonstrated an all-optical diagnostic system that enhances the observation of defects in periodic structures. This real-time technique employs a spatial light modulator as a smart-pixel array for information processing in the Fourier transform plane of a lens. The system also includes a phase-conjugate mirror for autoalignment and for correction of optical wave-front aberrations that are imparted on the object light by the smart-pixel processor and its associated optical train.

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收藏

页码：1797 / 1799

页数：3

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