THE INTERACTION OF HYDROGEN WITH THE INP(100) SUBSTRATES STUDIED BY AES, ELASTIC PEAK ELECTRON-SPECTROSCOPY (EPES) AND EELS

The interaction of H-2 and H+ with InP(100) surfaces was studied by AES, EEL electron spectroscopy) supply more information than AES (Auger electron spectroscopy) alone. EPES measures the intensity of the elastic peak; the signal magnitude is determined by the elastic scattering cross section and the inelastic mean free path. Dramatic changes in the EPES spectra were observed on InP(100) surface cleaned by Ar+ ion bombardment and then exposed to 70 L H-2. For the evaluations of the EPES spectra, effective elastic scattering cross sections for a monolayer of H, C. P and In atoms were calculated for electron energies between E = 50 and 300 eV range. AES and EPES spectra indicated enrichment of P in the surface layer, heating the ion etched sample to 473 K and exposing it to H-2 resulted in the formation of a P monolayer on the surface, while the bombardment of the surface with H+ ions produced depletion of P in the surface layer. No experimental evidence was found using EELS (electron energy loss spectroscopy) and EPES for adsorption of H on the InP(100) surface.