DIRECT VISUAL OBSERVATION OF POWDER DYNAMICS IN RF PLASMA-ASSISTED DEPOSITION

被引：74

作者：

HOWLING, AA

HOLLENSTEIN, C

PARIS, PJ

机构：

[1] Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne, 1007 Lausanne

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 12期

关键词：

D O I：

10.1063/1.105322

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.

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页码：1409 / 1411

页数：3

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