ION INTERACTION WITH SOLIDS - SURFACE TEXTURING, SOME BULK EFFECTS, AND THEIR POSSIBLE APPLICATIONS

被引：79
作者：
AUCIELLO, O
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词：
D O I：
10.1116/1.571224
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：841 / 867
页数：27
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