SOME APPLICATIONS OF LOW-ANGLE NEUTRON-SCATTERING TO HYDROGENATED AMORPHOUS-SILICON MULTILAYERS

被引:0
作者
VERGNAT, M
HOUSSAINI, S
MARCHAL, G
MANGIN, P
VETTIER, C
机构
[1] INST MAX VON LAUE PAUL LANGEVIN,F-38042 GRENOBLE,FRANCE
[2] EUROPEAN SYNCHROTRON RES FACIL,F-38043 GRENOBLE,FRANCE
来源
PHYSICA B | 1992年 / 180卷
关键词
D O I
10.1016/0921-4526(92)90795-T
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
This paper describes some applications of low angle neutron scattering to evaporated a-Si:H multilayers. The modulation of hydrogen is shown by periodic structures of type Si:H/Si:D/Si:H/Si:D/... or Si/Si:H/Si/Si:D/... The use of mixtures M = H(1-x)D(x) in type Si/Si:M/Si/Si:M/... samples permits variation of the contrast between the pure silicon layer and the less dense "hydrogenated" silicon layer. Finally, measurements of diffusivity of hydrogen are presented.
引用
收藏
页码:471 / 473
页数:3
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