DEPOSITION OF HYDROGENATED AMORPHOUS-CARBON FILMS BY AN ECR MICROWAVE PLASMA

被引：4
|
作者：
SCHARFF, W
HAMMER, K
EIBISCH, B
STENZEL, O
ROTH, S
FRAUENHEIM, T
机构：
[1] Technische Univ Karl-Marx-Stadt, Germany
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 112卷 / 02期
关键词：
21;
D O I：
10.1002/pssa.2211120222
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：667 / 677
页数：11
相关论文
共 50 条
  • [1] MICROWAVE PLASMA APPARATUS FOR DEPOSITION OF HYDROGENATED AMORPHOUS-CARBON LAYERS
    HAMMER, K
    ROTH, S
    MAINZ, B
    STENZEL, O
    SCHARFF, W
    DWORSCHAK, W
    KLEBER, R
    KRUGER, A
    JUNG, K
    EHRHARDT, H
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 140 : 784 - 787
  • [2] OPTICAL STUDIES OF HYDROGENATED AMORPHOUS-CARBON PLASMA DEPOSITION
    WAGNER, J
    WILD, C
    POHL, F
    KOIDL, P
    APPLIED PHYSICS LETTERS, 1986, 48 (02) : 106 - 108
  • [3] HYDROGENATED AMORPHOUS-CARBON FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION
    CHOU, LH
    JOURNAL OF APPLIED PHYSICS, 1992, 72 (05) : 2027 - 2035
  • [4] EFFECT OF TEMPERATURE ON THE DEPOSITION RATE AND PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS
    WOOD, P
    WYDEVEN, T
    TSUJI, O
    SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3): : 399 - 405
  • [5] SPUTTERING CHARACTERISTICS OF DIAMOND AND HYDROGENATED AMORPHOUS-CARBON FILMS BY RF PLASMA
    KOBAYASHI, K
    YAMAMOTO, K
    MUTSUKURA, N
    MACHI, Y
    THIN SOLID FILMS, 1990, 185 (01) : 71 - 78
  • [6] ELECTRICAL CHARACTERIZATION OF PLASMA-DEPOSITED HYDROGENATED AMORPHOUS-CARBON FILMS
    HAMMER, P
    HELMBOLD, A
    ROHWER, KC
    MEISSNER, D
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 139 (1-2): : 334 - 338
  • [7] MICROSTRUCTURES OF HYDROGENATED AMORPHOUS-CARBON FILMS PREPARED BY RF PLASMA CVD
    SHIMIZU, H
    NAKAO, S
    KUSAKABE, H
    NODA, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 196 - 198
  • [8] INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS
    GRILL, A
    MEYERSON, BS
    PATEL, VV
    REIMER, JA
    PETRICH, MA
    JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 2874 - 2877
  • [9] LABORATORY SYNTHESIS OF HYDROGENATED AMORPHOUS-CARBON FILMS
    OGMEN, M
    DULEY, WW
    ASTROPHYSICAL JOURNAL, 1988, 334 (02): : L117 - L120
  • [10] A STUDY OF ELECTROLUMINESCENCE IN HYDROGENATED AMORPHOUS-CARBON FILMS
    ZHANG, FQ
    CHEN, GG
    ZHANG, YF
    LI, YH
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 115 (1-3) : 87 - 89
12345