COMPOSITIONALLY MODULATED SPUTTERED INSB-GASB SUPER-LATTICES - CRYSTAL-GROWTH AND INTERLAYER DIFFUSION

被引:47
作者
ELTOUKHY, AH
GREENE, JE
机构
[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.325643
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:505 / 517
页数:13
相关论文
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