PIEZORESISTIVE PROPERTIES OF ION-IMPLANTED LAYERS IN SILICON

被引：0
|
作者：
CHU, SF [1 ]
TOPICH, JA [1 ]
KO, WH [1 ]
机构：
[1] CASE WESTERN RESERVE UNIV,CTR ENGN DESIGN,CLEVELAND,OH 44106
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C309 / C309
页数：1
相关论文
共 50 条
  • [21] Peculiarities of the electron structure of nanosized ion-implanted layers in silicon
    A. S. Rysbaev
    Zh. B. Khuzhaniyazov
    M. T. Normuradov
    A. M. Rakhimov
    I. R. Bekpulatov
    Technical Physics, 2014, 59 : 1705 - 1710
  • [22] REGROWTH BEHAVIOR OF ION-IMPLANTED AMORPHOUS LAYERS ON [111] SILICON
    CSEPREGI, L
    MAYER, JW
    SIGMON, TW
    APPLIED PHYSICS LETTERS, 1976, 29 (02) : 92 - 93
  • [23] GROWTH OF SILICON EPITAXY OVER ION-IMPLANTED BURIED LAYERS
    KANNAN, VC
    ROPER, G
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) : C120 - C120
  • [24] RECRYSTALLIZATION OF ION-IMPLANTED SILICON LAYERS .1. PB-ION IMPLANTED SI
    WILLIAMS, JS
    CHRISTODOULIDES, CE
    GRANT, WA
    ANDREW, R
    BRAWN, JR
    BOOTH, M
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (1-2): : 55 - 66
  • [25] ANNEALING PROPERTIES OF ION-IMPLANTED PARANORMAL JUNCTIONS IN SILICON
    MICHEL, AE
    FANG, FF
    PAN, ES
    JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) : 2991 - 2996
  • [26] VOIDS IN ION-IMPLANTED SILICON
    ROMANOV, SI
    SMIRNOV, LS
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 37 (1-2): : 121 - 126
  • [27] ION-IMPLANTED ARSENIC IN SILICON
    LARSEN, AN
    CHRISTENSEN, B
    CHRISTENSEN, PH
    SHIRYAEV, SY
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 697 - 701
  • [28] STRUCTURE OF ION-IMPLANTED SILICON
    MOSS, SC
    FLYNN, P
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1971, 16 (12): : 1392 - &
  • [29] ION-IMPLANTED SILICON TRANSISTORS
    MARSHALL, S
    SOLID STATE TECHNOLOGY, 1974, 17 (08) : 27 - 27
  • [30] CRYSTAL IMPERFECTIONS IN SILICON EPITAXIAL LAYERS GROWN ON ION-IMPLANTED SUBSTRATES
    BAKER, JFC
    OGDEN, R
    JOURNAL OF MATERIALS SCIENCE, 1975, 10 (07) : 1259 - 1261
12345