THIN FILMS OF NIOBIUM NITRIDE AND TANTALUM NITRIDE DEPOSITED BY REACTIVE EVAPORATION

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作者：
RAIRDEN, JR
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ELECTROCHEMICAL TECHNOLOGY | 1968年 / 6卷 / 7-8期
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O646 [电化学、电解、磁化学];
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081704 ;
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页码：269 / &
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