PROPERTIES OF DIAMOND-LIKE CARBON

被引:672
作者
ROBERTSON, J
机构
[1] National Power Labs, Leatherhead
关键词
D O I
10.1016/0257-8972(92)90001-Q
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper reviews the preparation and properties of hard forms of amorphous carbon and hydrogenated amorphous carbon, often known as diamond-like carbon. Properties such as the hydrogen content, sp3 content, optical gap, refractive index, hardness, elastic modulus and friction and their dependence on the deposition conditions are described. Models of the electronic structure and mechanical properties are used to relate the physical properties to the atomic structure.
引用
收藏
页码:185 / 203
页数:19
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共 132 条
[21]  
CATHERINE Y, 1991, P NATO ASI DIAMOND D
[22]  
CATHERINE Y, 1987, P EUR MRS, V17
[23]   THE RESPONSE OF SOLIDS TO ELASTIC PLASTIC INDENTATION .1. STRESSES AND RESIDUAL-STRESSES [J].
CHIANG, SS ;
MARSHALL, DB ;
EVANS, AG .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) :298-311
[24]   CHEMICAL-STRUCTURE AND PHYSICAL-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING [J].
CHO, NH ;
KRISHNAN, KM ;
VEIRS, DK ;
RUBIN, MD ;
HOPPER, CB ;
BHUSHAN, B ;
BOGY, DB .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2543-2554
[25]   CALCULATION OF BULK MODULI OF DIAMOND AND ZINCBLENDE SOLIDS [J].
COHEN, ML .
PHYSICAL REVIEW B, 1985, 32 (12) :7988-7991
[26]   SPUTTER DEPOSITION OF DENSE DIAMOND-LIKE CARBON-FILMS AT LOW-TEMPERATURE [J].
CUOMO, JJ ;
DOYLE, JP ;
BRULEY, J ;
LIU, JC .
APPLIED PHYSICS LETTERS, 1991, 58 (05) :466-468
[27]   OPTICAL-ABSORPTION EDGE AND DISORDER EFFECTS IN HYDROGENATED AMORPHOUS DIAMONDLIKE CARBON-FILMS [J].
DATTA, T ;
WOOLLAM, JA ;
NOTOHAMIPRODJO, W .
PHYSICAL REVIEW B, 1989, 40 (09) :5956-5960
[28]   AMORPHIC DIAMOND FILMS PRODUCED BY A LASER PLASMA SOURCE [J].
DAVANLOO, F ;
JUENGERMAN, EM ;
JANDER, DR ;
LEE, TJ ;
COLLINS, CB .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (04) :2081-2087
[29]  
DEEMAN D, 1984, PHYS REV B, V30, P870
[30]   BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].
DISCHLER, B ;
BUBENZER, A ;
KOIDL, P .
SOLID STATE COMMUNICATIONS, 1983, 48 (02) :105-108