PROPERTIES OF DIAMOND-LIKE CARBON

被引：672
作者：
ROBERTSON, J
机构：
[1] National Power Labs, Leatherhead
来源：
SURFACE & COATINGS TECHNOLOGY | 1992年 / 50卷 / 03期
关键词：
D O I：
10.1016/0257-8972(92)90001-Q
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper reviews the preparation and properties of hard forms of amorphous carbon and hydrogenated amorphous carbon, often known as diamond-like carbon. Properties such as the hydrogen content, sp3 content, optical gap, refractive index, hardness, elastic modulus and friction and their dependence on the deposition conditions are described. Models of the electronic structure and mechanical properties are used to relate the physical properties to the atomic structure.
引用
收藏
页码：185 / 203
页数：19
相关论文
共 132 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]  
Aksenov I. I., 1980, Soviet Physics - Technical Physics, V25, P1164
[3]  
Angus J. C., 1987, P EUROPEAN MATERIALS, V17, P179
[4]  
ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5
[5]   DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J].
ANGUS, JC ;
JANSEN, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1778-1782
[6]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[7]  
ANGUS JC, 1986, PLASMA DEPOSITED THI
[8]  
[Anonymous], 1979, PROPERTIES DIAMOND
[9]   COMPARISON OF DIAMOND-LIKE COATINGS DEPOSITED WITH C+ AND VARIOUS HYDROCARBON ION-BEAMS [J].
ANTTILA, A ;
KOSKINEN, J ;
LAPPALAINEN, R ;
HIRVONEN, JP ;
STONE, D ;
PASZKIET, C .
APPLIED PHYSICS LETTERS, 1987, 50 (03) :132-134
[10]  
ASHYB MF, 1980, ENG MATERIALS, P58
12345678910