REACTIVE SCHOTTKY-BARRIER FORMATION - THE PD-SI INTERFACE

被引：28

作者：

FREEOUF, JL

RUBLOFF, GW

HO, PS

KUAN, TS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.570616

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：916 / 919

页数：4

共 26 条

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