EFFECT OF HCL AND CL2 ON THERMAL OXIDATION OF SILICON

被引:148
作者
KRIEGLER, RJ
CHENG, YC
COLTON, DR
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D O I
10.1149/1.2404208
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:388 / &
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