THIN EPITAXIAL GE-SI(111) FILMS - STUDY AND CONTROL OF MORPHOLOGY

被引：162

作者：

MAREE, PMJ ^{[1
]}

NAKAGAWA, K ^{[1
]}

MULDERS, FM ^{[1
]}

VANDERVEEN, JF ^{[1
]}

KAVANAGH, KL ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853

来源：

SURFACE SCIENCE | 1987年 / 191卷 / 03期

关键词：

D O I：

10.1016/S0039-6028(87)81180-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：305 / 328

页数：24

共 51 条

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