COMPOUND FORMATION AND KINETICS IN AL-PD2SI REACTIONS

被引：5

作者：

LIU, JC

MAYER, JW

机构：

来源：

关键词：

D O I：

10.1557/JMR.1989.0336

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：336 / 342

页数：7

共 14 条

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[3]

COLGAN EG, 1987, THESIS CORNELL U

DOOLITTLE, LR .

[5]

Ferro R., 1963, ATTI ACAD NAZ LINCEI, V34, P659

[6] MATERIAL REACTIONS AL/PD2SI/SI JUNCTIONS .2. KINETIC RATES [J].

HO, PS ;

LEWIS, JE ;

KOSTER, U .

HOSACK, HH .

[8]

KOKELEK E, 1978, THIN SOLID FILMS, V53, P135

[9]

KOSTER U, 1982, J APPL PHYS, V53, P7436, DOI 10.1063/1.330113

[10]

Liu J., UNPUB