THE ETCHING MECHANISM OF TITANIUM POLYCIDE IN A MIXTURE OF SF6 AND O2

被引：8

作者：

MANENSCHIJN, A

JANSSEN, GCAM

VANDERDRIFT, E

RADELAAR, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期

关键词：

D O I：

10.1063/1.342675

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3226 / 3235

页数：10

共 54 条

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