CHEMICAL-REACTIONS OF N-2+ ION-BEAMS WITH GROUP-IV ELEMENTS AND THEIR OXIDES

被引:163
作者
TAYLOR, JA
LANCASTER, GM
RABALAIS, JW
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关键词
D O I
10.1016/0368-2048(78)85047-6
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
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页码:435 / 444
页数:10
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共 45 条
[1]   THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN [J].
AMANO, J ;
BRYCE, P ;
LAWSON, RPW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02) :591-595
[2]  
BRADSHAW AM, 1975, VERLAG CHEM, P1095
[3]   X-RAY PHOTOELECTRON STUDY OF SOME SILICON-OXYGEN COMPOUNDS [J].
CARRIERE, B ;
DEVILLE, JP ;
BRION, D ;
ESCARD, J .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (02) :85-91
[4]  
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[5]  
COTTON FA, 1972, ADV INORGANIC CHEM, P289
[6]  
DEARNALEY G., 1973, ION IMPLANTATION
[7]   ENERGY-DEPENDENCE OF REACTIONS OF ATOMIC TRITIUM WITH 1-CHLOROBUTANE [J].
DURANA, S ;
LEROY, RL ;
MENZINGER, M ;
YENCHA, AJ .
JOURNAL OF CHEMICAL PHYSICS, 1974, 60 (06) :2568-2569
[8]   SOFT LANDING OF IONS AS A MEANS OF SURFACE MODIFICATION [J].
FRANCHETTI, V ;
SOLKA, BH ;
BAITINGER, WE ;
AMY, JW ;
COOKS, RG .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1977, 23 (01) :29-35
[9]   THEORY OF AUGER EJECTION OF ELECTRONS FROM METALS BY IONS [J].
HAGSTRUM, HD .
PHYSICAL REVIEW, 1954, 96 (02) :336-365
[10]   DETERMINATION OF ENERGY-LEVEL SHIFTS WHICH ACCOMPANY CHEMISORPTION [J].
HAGSTRUM, HD .
SURFACE SCIENCE, 1976, 54 (02) :197-209