NONDESTRUCTIVE SINGLE-SHOT SOFT-X-RAY LITHOGRAPHY AND CONTACT MICROSCOPY USING A LASER-PRODUCED PLASMA SOURCE

被引：12
作者：
ROSSER, RJ
FEDER, R
NG, A
ADAMS, F
CELLIERS, P
SPEER, RJ
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
[2] UNIV LONDON IMPERIAL COLL SCI & TECHNOL, BLACKETT LAB, LONDON SW7 2BZ, ENGLAND
[3] UNIV BRITISH COLUMBIA, DEPT PHYS, VANCOUVER V6T 2A6, BC, CANADA
来源：
APPLIED OPTICS | 1987年 / 26卷 / 19期
关键词：
D O I：
10.1364/AO.26.004313
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：4313 / 4318
页数：6
相关论文
共 26 条
  • [1] BURCH GJ, 1896, NATURE, V54, P111
  • [2] CHENG PC, 1984, XRAY MICROSCOPY, P285
  • [3] X-RAY MICROSCOPY
    COSSLETT, VE
    [J]. REPORTS ON PROGRESS IN PHYSICS, 1965, 28 : 381 - &
  • [4] LASER X-RAY MICROSCOPY
    EASON, RW
    CHENG, PC
    FEDER, R
    MICHETTE, AG
    ROSSER, RJ
    ONEILL, F
    OWADANO, Y
    RUMSBY, PT
    SHAW, MJ
    TURCU, ICE
    [J]. OPTICA ACTA, 1986, 33 (04): : 501 - 516
  • [5] DIRECT IMAGING OF LIVE HUMAN-PLATELETS BY FLASH X-RAY MICROSCOPY
    FEDER, R
    BANTON, V
    SAYRE, D
    COSTA, J
    BALDINI, M
    KIM, B
    [J]. SCIENCE, 1985, 227 (4682) : 63 - 64
  • [6] HIGH-RESOLUTION SOFT-X-RAY MICROSCOPY
    FEDER, R
    SPILLER, E
    TOPALIAN, J
    BROERS, AN
    GUDAT, W
    PANESSA, BJ
    ZADUNAISKY, ZA
    SEDAT, J
    [J]. SCIENCE, 1977, 197 (4300) : 259 - 260
  • [7] SPECIMEN REPLICATION FOR ELECTRON-MICROSCOPY USING X-RAYS AND X-RAY RESIST
    FEDER, R
    SAYRE, D
    SPILLER, E
    TOPALIAN, J
    KIRZ, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (03) : 1192 - 1193
  • [8] FEDER R, 1980, ANN NY ACAD SCI, V342, P213
  • [9] ABSORPTION MICROANALYSIS WITH A SCANNING SOFT-X-RAY MICROSCOPE - MAPPING THE DISTRIBUTION OF CALCIUM IN BONE
    KENNEDY, JM
    JACOBSEN, C
    KIRZ, J
    RARBACK, H
    CINOTTI, F
    THOMLINSON, W
    ROSSER, R
    SCHIDLOVSKY, G
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1985, 138 (JUN): : 321 - 328
  • [10] FORMATION OF OPTICAL IMAGES BY X-RAYS
    KIRKPATRICK, P
    BAEZ, AV
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1948, 38 (09) : 766 - 774
123