AUTOMATIC JET THINNING OF GAAS FOR TRANSMISSION ELECTRON MICROSCOPY

被引：7

作者：

HILL, MJ

HOLT, DB

UNVALA, BA

机构：

[1] Metallurgy Department, Imperial College

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1968年 / 1卷 / 03期

关键词：

D O I：

10.1088/0022-3735/1/3/307

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Jet thinning equipment is described which incorporates a photomultiplier system to stop the etching when the specimen is thin enough to be electron transparent. A micromanipulator mounting made it possible to thin preselected areas. The equipment produced large areas of uniform and reproducible thickness with a one hundred per cent success rate.

引用

页码：301 / &