LOW-ENERGY SPUTTERING YIELDS BY RESONANCE ABSORPTION + EMISSION SPECTROSCOPIC METHODS

被引：15
作者：
KREYE, WC
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1964年 / 35卷 / 12期
关键词：
D O I：
10.1063/1.1713273
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3575 / &
相关论文
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