GROWTH OF DIELECTRIC FILMS ON SEMICONDUCTORS AND METALS USING A MULTIPOLE PLASMA

被引：9

作者：

GOURRIER, S

FRIEDEL, P

DIMITRIOU, P

THEETEN, JB

机构：

来源：

THIN SOLID FILMS | 1981年 / 84卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90173-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：379 / 388

页数：10

共 23 条

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