MACROSCOPIC THEORY OF PULSED-LASER ANNEALING .2. DOPANT DIFFUSION AND SEGREGATION

被引：112
作者：
WOOD, RF
KIRKPATRICK, JR
GILES, GE
机构：
来源：
PHYSICAL REVIEW B | 1981年 / 23卷 / 10期
关键词：
D O I：
10.1103/PhysRevB.23.5555
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：5555 / 5569
页数：15
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